INTERN - EUV Droplet Pushout Controller
For MOPA+PP operation, it is anticipated that dynamic push-out compensations will be required. Through past efforts, a push-out compensation algorithm was designed. This algorithm was never implemented or tested on a MOPA+PP source. In this project, the intern is tasked to implement this algorithm.
Implement a dynamic push out compensation algorithm and characterize its effectiveness.
Understand push out behavior, performance requirements, and the compensation algorithm already specified. Implement the push-out compensation algorithm on local controller; verify performance impact on source; and iterate / improve algorithm as necessary to meet requirement.
Contribution to Cymer:
The dynamic push-out compensation algorithm was developed but not yet implemented in SW due to resource constraint and lack of definitive need (or proof of effectiveness). If successful, this project will address both issues.
Benefit/Experience for Intern:
Gain practical experience of implementing a control algorithm and verifying it on a truly cutting edge commercial equipment.
Intern Qualifications/Experience Desired:
C++ and embedded programming;
Control system analysis and design courses.
Cymer, Inc - 22 months ago
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